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pps-8500

Panel level Stepper

pps-8500
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PPS-8500

Panel level Stepper

Applications

Features

  • Variable Lens NA and 1:1 Dyson Optical System
  • Large Exposure Field : 52×33 mm2
  • User Friendly Reticle Design (max.8 fields)
  • Outgas Protection Unit for Optics
  • Handling System for thin Panel and warped Pane
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