Panel level Stepper
PLAY VIDEO:
PPS-8500
Panel level Stepper
Applications
- 2.5D, 3D Package
- Various Interposers
- WL-CSP/FO-PLP
Features
- Variable Lens NA and 1:1 Dyson Optical System
- Large Exposure Field : 52×33 mm2
- User Friendly Reticle Design (max.8 fields)
- Outgas Protection Unit for Optics
- Handling System for thin Panel and warped Pane
